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HIGH DENSITY MAGNETIC RECORDING FILM AND METHOD FOR MANUFACTURING THE SAME BY USING RAPID THERMAL ANNEALING TREATMENT
HIGH DENSITY MAGNETIC RECORDING FILM AND METHOD FOR MANUFACTURING THE SAME BY USING RAPID THERMAL ANNEALING TREATMENT
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机译:高密度磁记录膜及通过快速热退火处理制造相同膜的方法
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摘要
A high density magnetic recording film by using a rapid thermal annealing process is provided. The high density magnetic recording film includes a substrate; and a ferromagnetic layer formed on the substrate; wherein the rapid thermal annealing process is performed for the ferromagnetic layer at a temperature range of 600 to 800° C. for 5 to 180 seconds with a heating ramp rate of 60 to 100° C./sec so as to obtain the high density magnetic recording film.
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