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MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXES
MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXES
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机译:游离碱金属Cp复合物的制造
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摘要
Methods and compositions for the deposition of a metal containing film on a substrate. The film is deposited with a substantially adduct free precursor which is prepared by a process to remove the adduct from an adducted starting material.
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