HIGH RESOLUTION MULTIMODAL IMAGING FOR NON-DESTRUCTIVE EVALUATION OF POLYSILICON SOLAR CELLS

摘要

A non-destructive evaluation system for evaluating an article such as a test sample, the system comprising:a silicon-based CCD camera for obtaining a series of images of the article;first apparatus for receiving the series of images of the article from the silicon-based CCD camera and using a first imaging modality to generate a first data set spatially correlated to the article;second apparatus for receiving the series of images of the article from the silicon-based CCD camera and using a second imaging modality to generate a second data set spatially correlated to the article; andprocessing apparatus for processing at least one of the first and second data sets so as to evaluate at least one physical characteristic of the article.