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Process for producing silicon process for the separation of a mass of silicon fusion salt and process for production of silicon tetrafluoride.
Process for producing silicon process for the separation of a mass of silicon fusion salt and process for production of silicon tetrafluoride.
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机译:制备硅的方法,用于分离大量硅熔盐的方法和制备四氟化硅的方法。
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摘要
Process for producing silicon process for separating silicon from a molten mass of salt and process for production of silicon tetrafluoride.; The invention relates to the technology of semiconductor silicon. The process according to the invention is the electrolytic separation saturated with silicon tetrafluoride formed by a ternary system of alkali metal salts fluoride eutectic melt. For saturation melt one silicon tetrafluoride obtained by fluorination of silicon dioxide, wherein the fluorination is performed in two steps is used, this is the first step elemental fluorine is fed in excess and in the second stage is fed the silicon dioxide. Separation of the silicon powder of eutectic melt salt fluorides is performed by dissolving the melt containing silicon particles using anhydrous hydrogen fluoride and subsequent filtration to isolate the solid phase as silicon powder.
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