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Process for producing silicon process for the separation of a mass of silicon fusion salt and process for production of silicon tetrafluoride.

机译:制备硅的方法,用于分离大量硅熔盐的方法和制备四氟化硅的方法。

摘要

Process for producing silicon process for separating silicon from a molten mass of salt and process for production of silicon tetrafluoride.; The invention relates to the technology of semiconductor silicon. The process according to the invention is the electrolytic separation saturated with silicon tetrafluoride formed by a ternary system of alkali metal salts fluoride eutectic melt. For saturation melt one silicon tetrafluoride obtained by fluorination of silicon dioxide, wherein the fluorination is performed in two steps is used, this is the first step elemental fluorine is fed in excess and in the second stage is fed the silicon dioxide. Separation of the silicon powder of eutectic melt salt fluorides is performed by dissolving the melt containing silicon particles using anhydrous hydrogen fluoride and subsequent filtration to isolate the solid phase as silicon powder.
机译:生产硅的方法是从盐的熔融物料中分离硅的方法和生产四氟化硅的方法。本发明涉及半导体硅技术。根据本发明的方法是通过由碱金属盐氟化物低共熔熔体的三元体系形成的四氟化硅饱和进行电解分离。对于饱和熔融的一种通过二氧化硅氟化而获得的四氟化硅,其中使用在两个步骤中进行氟化,这是第一步将过量的元素氟供入,而在第二步中将二氧化硅供入。共晶熔盐氟化物的硅粉的分离是通过使用无水氟化氢溶解含硅颗粒的熔体并随后过滤以将固相分离为硅粉来进行的。

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