DEVICE FOR DEFORMING TRANSMISSIVE OPTICAL ELEMENT FOR INHIBITING DETERIORATION OF OPTICAL PERFORMANCE BY BIREFRINGENCE, AND EXPOSURE APPARATUS

摘要

PURPOSE: A device for deforming a transmissive optical element, an exposure apparatus containing the device, and a manufacturing method of a device are provided to inhibit the deterioration of optical performance due to birefringence generated in case of the deformation of a transmissive optical element.;CONSTITUTION: A device for deforming a transmissive optical element comprises a rotating member(202) which holds an optical element and deforms it by rotating it around the shaft parallel in the tangent line of the circumference of the optical element at the optical element-holding position; a torque generation part(250) which generates the torque for rotating the rotating member at the around of the shaft; a holding base(207); and an elastic member which connects the holding base and the torque generation part.;COPYRIGHT KIPO 2010