DETECTION METHOD OF THE OPTIMIZED COMPOSITION OF TRANSPARENT AND CONDUCTIVE THIN FILMS AND MANGETRON SPUTTERING DEVICE FOR THE METHOD

摘要

PURPOSE: A detection method of optimized composition of transparent and conductive thin films and a magnetron sputtering device for the same are provided to obtain many thin films of different thickness and composition ratio by one deposition process. CONSTITUTION: A mask(110) is arranged on a processed object holder. A substrate(200) is arranged on the mask. A target to be deposited on the substrate is arranged on two or more sputter source units. Two or more sputter source units face to the mask. The sputter source units are located on both ends of the substrate. The sputter source units are separated each other. In a fixing state of the processed object holder, a deposition process is performed. A plurality of thin films is obtained by separation of the substrate from the mask. A plurality of thin films is analyzed.