STORAGE CONTAINER FOR LIQUID CHLOROSILANE AND A CLOSING LID FOR THE SAME TO ENSURE THE SOUNDNESS OF THE VALVE IN A SIMPLE CONFIGURATION

摘要

PURPOSE: A storage container for liquid chlorosilane and a closing lid for the same are provided to prevent the generation of corrosive gas due to the leakage of contents.;CONSTITUTION: A tank(11) contains chlorosilane liquid. Valves(40A,40B) are installed in the tank in which external pipes can be attached. Each valve is composed of a housing and a valve body formed within the housing. A closing lid is employed to seal the valves when the external pipes are detached or attached to the valves.;COPYRIGHT KIPO 2010