AMMONIA GAS SUPPLY DEVICE WHICH SMOOTHLY CAN SUPPLY THE HUGE AMOUNT OF HIGH PURITY AMMONIA GAS

摘要

PURPOSE: An ammonia gas supply device which smoothly can supply the huge amount of high purity ammonia gas is provided to consecutively supply liquid ammonia using two tanks which contains liquid ammonia.;CONSTITUTION: An ammonia gas supply device which smoothly can supply the huge amount of high purity ammonia gas comprises a first tank(110), a second tank(120), a transition part(200), a vaporizer(300), one or more storage tank(400), and a distributor(500). The first tank stores liquid ammonia. The second tank independently stores and supply liquid ammonia. The transition part selects the first tank and the second tank in order to supply the liquid ammonia for following step. The vaporizer vaporizes 'the liquid ammonia. The storage tank stores 'the ammonia gas. A heating member is mounted on the storage tank to control the pressure and temperature of the ammonia gas.;COPYRIGHT KIPO 2010