首页> 外国专利> IMAGE SENSOR AND A METHOD FOR MANUFACTURING THE SAME, CAPABLE OF IMPROVING THE PROPERTY OF A THREE DIMENSIONAL IMAGE SENSOR WITHOUT CHEMICAL AND MECHANICAL POLISHING

IMAGE SENSOR AND A METHOD FOR MANUFACTURING THE SAME, CAPABLE OF IMPROVING THE PROPERTY OF A THREE DIMENSIONAL IMAGE SENSOR WITHOUT CHEMICAL AND MECHANICAL POLISHING

机译:图像传感器及其制造方法,能够在不进行化学和机械抛光的情况下提高三维图像传感器的性能

摘要

PURPOSE: An image sensor and a method for manufacturing the same are provided to perform a fine patterning process by forming a metal for a contact plug in a via-hole.;CONSTITUTION: A readout circuit is formed on a first substrate. A first interlayer insulation layer(160) is formed on the first substrate. A wiring(150) is formed on the first interlayer insulation layer to be electrically connected to the readout circuit. A second interlayer insulation layer(162) is formed on the wiring. The second interlayer insulation layer is partially etched using a photo resist pattern as an etching mask in order to form a via-hole which exposes the upper side of the wiring. A contact plug is formed in the via-hole.;COPYRIGHT KIPO 2010
机译:目的:提供一种图像传感器及其制造方法,以通过在通孔中形成用于接触塞的金属来执行精细的图案化工艺。组成:在第一基板上形成读出电路。在第一基板上形成第一层间绝缘层(160)。布线(150)形成在第一层间绝缘层上以电连接到读出电路。在布线上形成第二层间绝缘层(162)。使用光致抗蚀剂图案作为蚀刻掩模来部分地蚀刻第二层间绝缘层,以形成露出布线的上侧的通孔。通孔中形成有接触塞。; COPYRIGHT KIPO 2010

著录项

  • 公开/公告号KR20100041416A

    专利类型

  • 公开/公告日2010-04-22

    原文格式PDF

  • 申请/专利权人 DONGBU HITEK CO. LTD.;

    申请/专利号KR20080100584

  • 发明设计人 JUNG CHUNG KYUNG;

    申请日2008-10-14

  • 分类号H01L27/146;

  • 国家 KR

  • 入库时间 2022-08-21 18:32:54

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