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APPARATUS FOR ANNEALING ELECTRON BEAM AND A METHOD FOR ANNEALING USING THE SAME, WHICH PERFORMS AN ANNEALING PROCESS WITH RESPECT TO A THIN FILM DEPOSITED ON A SUBSTRATE
APPARATUS FOR ANNEALING ELECTRON BEAM AND A METHOD FOR ANNEALING USING THE SAME, WHICH PERFORMS AN ANNEALING PROCESS WITH RESPECT TO A THIN FILM DEPOSITED ON A SUBSTRATE
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机译:对电子束进行退火的装置以及使用相同方法进行退火的方法,该方法对沉积在基板上的薄膜执行退火过程
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摘要
PURPOSE: An apparatus for annealing electron beam and a method for annealing using the same are provided to perform an activation process without the damage of a thin film deposed on a substrate by injecting the electron beam toward the substrate with a pulse manner and subsequently injecting reaction gas.;CONSTITUTION: A substrate(120) is located within a chamber(110). A thin film(121) composed of a pre-set material is deposited on the substrate. An electron beam injecting unit(130) injects electronic beam into the pre-set area of the substrate in a pulse manner. A reaction gas is supplied to the inside of the chamber. A bias application unit(140) applies a bias voltage to the substrate.;COPYRIGHT KIPO 2010
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