SCRIBE DEVICE, SCRIBE METHOD, AND CHIP HOLDER

摘要

A chip (14) is rotatably attached to a chip holder (10). The chip holder (10) is made into a cylindrical shape and its tip end has an attachment unit (16). An opening is arranged at a holder joint. The chip holder (10) is adsorbed by a magnet for attachment so that detaching and attaching can be performed easily. Chip offset data is recorded as a two-dimensional code (17) on the surface of the chip holder (10). When replacing the chip holder, the offset data is read out and inputted to a scribe device, thereby cancelling the offset. This eliminates the operation required for correction when attaching/detaching the chip holder and enables easy chip replacement during a short time of device stop.;COPYRIGHT KIPO & WIPO 2010