首页>
外国专利>
AUTOMATIC REFILL SYSTEM FOR ULTRA PURE OR CONTAMINATION SENSITIVE CHEMICALS
AUTOMATIC REFILL SYSTEM FOR ULTRA PURE OR CONTAMINATION SENSITIVE CHEMICALS
展开▼
机译:用于超纯或污染敏感化学品的自动回填系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the system's manifold and transfer lines relatively free of chemical fire hazards; leaves them free of oxygen contamination; and leaves the composition of the system's carrier gas unaffected, between refills.
展开▼