Device for processing workpieces with a two-dimensional deviating energy beam comprises an element rotating concentrically to the main axis/optical axis of the beam

摘要

Device for processing workpieces with a two-dimensional deviating energy beam (10) comprises an element (1) rotating concentrically to the main axis/optical axis (A) of the beam. Elements (2, 3) for reflecting the beam are arranged on the rotating element at a distance from the axis of rotation so that the beam hitting the first reflecting element (2) hits the second reflecting element (3) and is reflected onto the workpiece. A controllable drive unit (5) positions the reflecting elements. Preferred Features: The energy beam is a laser beam, a plasma beam, an ion beam or an electron beam. The rotating element is a support.