Transport device for a vacuum process system, drive device for a plant component of a vacuum process plant, and a vacuum process plant

摘要

The present invention relates to embodiments of a transport device for a vacuum process plant, a drive device for high temperature processes in vacuum processing apparatuses, and a vacuum process plant with such a drive device. The solution of the object, a drive mechanism, in particular for a plant component of a vacuum process plant, to develop polygon effect operates freely, extending endlessly can be connected, is suitable for high temperatures, insensitive to radiant heat, there is no outgassing is generated and requires no lubricant, is defined by means of a drive device for a plant component of a vacuum process plant is achieved, which a around at least two guide rollers (2) and guided by means of traction means (4), wherein the traction means (4) is an endless metal band.