THIN FILM COATING DEVICE FOR PRETREATMENT OF ELECTRON MICROSCOPE OBSERVATION SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a pretreatment device for forming adhesion (coating) of conductive thin film particles uniformly as much as possible onto each surface of a sample having a complicated shape as well as to the inside of holes, in order to prevent charged phenomenon on the sample surface.;SOLUTION: A conductive thin film is formed on the sample surface by allowing adhesion of atoms of a sputtered target 2 onto a sample 10 placed on a stage 11. In this case, in order to form uniformly a conductive thin film which is homogeneous as much as possible on the sample surface or on the periphery of fine projections or on inner walls of holes existing on a sidewall surface, the stage 11 on which the sample is placed is moved vertically by using a controller 7 through three actuators 12 mounted on lower parts of three holding positions separated mutually from the center of the stage surface, and thereby the sample is held in a constantly tilted state in the whole area in the 360° azimuth without rotating the sample on the stage surface, to thereby enable uniform coating on the surface of the non-conductive sample placed on the stage or on the sidewall surface.;COPYRIGHT: (C)2011,JPO&INPIT