PROBLEM TO BE SOLVED: To provide a calixresorcinarene derivative having controllable dissolution rate in an alkali developing liquid, useful as a chemically amplified negative-type resist material giving a pattern having good form in high sensitivity without lowering resolution, a method for producing the derivative, the negative-type resist composition containing the derivative, and a method for forming a pattern by using the negative-type resist composition.;SOLUTION: The calixresorcinarene derivative is produced by reacting a resorcinol derivative expressed by chemical formula (1) with an alkyl halide expressed by R3-X, thereby introducing a non-acid decomposable group to a phenolic hydroxy group of the resorcinol derivative. In the formula, R1 is aryl, substituted aryl, alkyl or the like; R2 is 1C-5C alkyl or the like; and n is an integer of 0-2.;COPYRIGHT: (C)2011,JPO&INPIT
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机译：解决的问题：为了提供在碱显影液中具有可控的溶解速率的杯形间苯二酚芳烃衍生物，用作化学放大负型抗蚀剂材料，其在不降低分辨率的情况下以高灵敏度形成具有良好形状的图案，其制备方法，含有该衍生物的负型抗蚀剂组合物，以及使用该负型抗蚀剂组合物形成图案的方法。解决方案：杯芳烃基芳烃衍生物是通过使化学式（1）表示的间苯二酚衍生物与卤代烷反应制得的。用R 3 -X表示，从而将非酸可分解基团引入间苯二酚衍生物的酚羟基。式中，R 1 为芳基，取代的芳基，烷基等。 R 2 是1C-5C烷基等。 n为0-2的整数。;版权：（C）2011，JPO＆INPIT
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