PROCESS PARAMETER SELECTION APPARATUS, PROCESS PARAMETER SELECTION METHOD, PROCESS PARAMETER SELECTION PROGRAM, PROGRAM RECORDING MEDIUM, AND PRODUCTION PROCESS MANAGEMENT APPARATUS CONTAINING THE PROCESS PARAMETER SELECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To select process parameters that can create a prediction model for predicting quality with high serviceability and high precision in a production process including multiple production apparatuses having the same function.;SOLUTION: The process parameters collected from the production process are set as explanatory variables and inspection data collected from an inspection process is set as target variables. PLS by production apparatus is performed and the process parameters having average process parameter VIP values equal to or larger than a reference value are selected as process parameters common to the production apparatuses and related to the quality. The process parameters that can create a prediction model with high precision are selected thus. Further, it is possible to reduce the number of process parameters to be managed, share the process parameters among all of the production apparatuses, reduce the number of steps and time for managing the process parameters, and obtain high serviceability.;COPYRIGHT: (C)2011,JPO&INPIT