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Apparatus and measurement method for the electrical measurement of the electrical drive parameters of MEMS-based display unit for
Apparatus and measurement method for the electrical measurement of the electrical drive parameters of MEMS-based display unit for
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机译:用于基于MEMS的显示单元的电驱动参数的电测量的设备和测量方法
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摘要
Method and device for measuring the threshold voltage of the MEMS device is disclosed. Threshold voltage is based on the test voltage causes a change in the state to the device. State change of the device is detected by monitoring the integrated current or integrated charge is used to drive the test voltage.
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