Laser double-sided groove processing apparatus and double-sided groove processing method

摘要

PPROBLEM TO BE SOLVED: To provide a double side grooving device and a double side grooving method using a laser beam by which double-side grooves which are small in the variation of groove properties on both sides are formed without especially increasing the cost of equipment. PSOLUTION: This device is a double-side grooving device by which a groove on both sides of a material to be worked is formed by projecting a laser light 2 to the material to be worked which is relatively moved and which has a laser beam head 16 which is arranged so as to irradiate the surface of the material to be worked with a laser light excited with an oscillator 14, a first nozzle 1 which is arranged so as to jet a first assisting gas 3 from the side of the surface of the material to be worked to a molten part by laser beam irradiation, a second nozzle 4 which is arranged so as to jet the second assisting gas 5 from the side of the rear surface of the material to be worked to the molten part by the laser beam irradiation, a first pressure control means 18a for adjusting the pressure of the first assisting gas and a second pressure control means 18b for adjusting the pressure of the second assisting gas. PCOPYRIGHT: (C)2007,JPO&INPIT