Surface-emitting laser element and the surface-emitting laser array and optical interconnection systems and optical communication systems and electronic photo system and an optical disk system

摘要

PROBLEM TO BE SOLVED: To provide a surface-emitting laser element which enhances design flexibility for the element, suppresses higher-order lateral-mode oscillation more effectively, and is capable of high-power operation with a single fundamental lateral mode.;SOLUTION: The surface-emitting laser element includes an AlGaAs mixed-crystal layer 113, wherein a part of the AlGaAs mixed-crystal layer 113 has a spatial overlap between the current injection region defined by a current constriction structure 108 and the laser resonating direction. By selective ion implantation of oxygen-containing molecules and a heat treatment after the ion implantation, the part of the AlGaAs mixed-crystal layer 113 having the spatial overlap between the current injection region defined by the current constriction structure 108 and the laser resonating direction forms a region of a relatively low refractive index with respect to the surrounding area in the same plane perpendicular to the laser resonating direction to which the ion implantation of the oxygen-containing molecules is not taken place.;COPYRIGHT: (C)2005,JPO&NCIPI