Body structure for a mass flow controller

摘要

PROBLEM TO BE SOLVED: To provide a body structure for a mass flow controller allowing improvement of measurement accuracy and mass flow control accuracy by suppressing transmission of stress distortion generated in screwing without depending on skill of an installation worker of fastening torque management or the like, and allowing weight reduction as a whole.;SOLUTION: A thick portion 2D except a surrounding portion 2B of peripheries of fluid conduits 10a-10d and fixing holding portions 2A of pressure gauges 3 of a rectangular parallelepiped body block 2 wherein the capacitance-type pressure gauges 3 are stored, disposed and fixed inside a plurality of recessed parts 5 and wherein a thick part is formed with the fluid conduits 10a-10d for applying fluid pressure to each the pressure gauge 3 are cut off and removed. A plurality of installation parts 12a-12c for screw fixing to a panel 11 or a main body box of the mass flow controller is formed correspondingly to the fixing holding portions 2A of the plurality of pressure gauges 3.;COPYRIGHT: (C)2007,JPO&INPIT