首页> 外国专利> ION GAUGE, A MONITORING SYSTEM AND A METHOD FOR DETERMINING A TOTAL INTEGRATED CONCENTRATION OF SUBSTANCES HAVING SPECIFIC MOLECULAR WEIGHT IN A GAS SAMPLE

ION GAUGE, A MONITORING SYSTEM AND A METHOD FOR DETERMINING A TOTAL INTEGRATED CONCENTRATION OF SUBSTANCES HAVING SPECIFIC MOLECULAR WEIGHT IN A GAS SAMPLE

机译:离子规,监测系统和测定气体样品中具有特定分子量的物质总积分浓度的方法

摘要

The invention relates to anion gauge10 for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample, comprising an ionization region in a vicinity of the ionization source 1; an accelerator 2, 3, 4 for generating a flow of said ionized molecules I; a mass filter 8 for intercepting said flow for separating ions having the molecular weight falling into said range from said ionized molecules and a detector 7 for generating a signal representative of the total integrated concentration of such ions present in the gas sample. The invention further relates to a lithographic apparatus and a method for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample.
机译:本发明涉及用于测定气体样品中具有落入分子量的预定范围内的分子量的物质的总积分浓度的阴离子计 10 。电离源 1 ;促进剂 2、3、4 ,用于产生所述离子化分子I的流;一个质量过滤器 8 ,用于拦截所述流,以从所述电离的分子中分离出分子量在所述范围内的离子;一个检测器 7 ,用于生成代表总积分的信号气体样品中此类离子的浓度。本发明还涉及一种用于确定气体样品中的分子量落入分子量的预定范围内的物质的总积分浓度的光刻设备和方法。

著录项

  • 公开/公告号US2011050242A1

    专利类型

  • 公开/公告日2011-03-03

    原文格式PDF

  • 申请/专利权人 NORBERTUS BENEDICTUS KOSTER;

    申请/专利号US20090867170

  • 发明设计人 NORBERTUS BENEDICTUS KOSTER;

    申请日2009-02-13

  • 分类号G01N27/62;

  • 国家 US

  • 入库时间 2022-08-21 18:12:26

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