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ION GAUGE, A MONITORING SYSTEM AND A METHOD FOR DETERMINING A TOTAL INTEGRATED CONCENTRATION OF SUBSTANCES HAVING SPECIFIC MOLECULAR WEIGHT IN A GAS SAMPLE
ION GAUGE, A MONITORING SYSTEM AND A METHOD FOR DETERMINING A TOTAL INTEGRATED CONCENTRATION OF SUBSTANCES HAVING SPECIFIC MOLECULAR WEIGHT IN A GAS SAMPLE
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机译:离子规,监测系统和测定气体样品中具有特定分子量的物质总积分浓度的方法
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摘要
The invention relates to anion gauge10 for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample, comprising an ionization region in a vicinity of the ionization source 1; an accelerator 2, 3, 4 for generating a flow of said ionized molecules I; a mass filter 8 for intercepting said flow for separating ions having the molecular weight falling into said range from said ionized molecules and a detector 7 for generating a signal representative of the total integrated concentration of such ions present in the gas sample. The invention further relates to a lithographic apparatus and a method for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample.
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