首页> 外国专利> HIGH EFFICIENCY LASER INSTALLATION FOR THE SYNTHESIS OF NANOSTRUCTURES FROM LIQUID PRECURSORS OF HIGH TOXICITY AND HAZARD BY THERMAL VAPORIZATION TO OBTAIN GAS PHASE AT TEMPERATURES HIGHER THAN THE BOILING TEMPERATURE LIMIT AND LOWER THAN THE DECOMPOSITION TEMPERATURE LIMIT, WITH AUTOMATIC PRECISION AND ACCURACY CONTROL OF TEMPERATURE UP TO 500°C AND HIGHLY REPRODUCTIBLE SYNTHESIS

HIGH EFFICIENCY LASER INSTALLATION FOR THE SYNTHESIS OF NANOSTRUCTURES FROM LIQUID PRECURSORS OF HIGH TOXICITY AND HAZARD BY THERMAL VAPORIZATION TO OBTAIN GAS PHASE AT TEMPERATURES HIGHER THAN THE BOILING TEMPERATURE LIMIT AND LOWER THAN THE DECOMPOSITION TEMPERATURE LIMIT, WITH AUTOMATIC PRECISION AND ACCURACY CONTROL OF TEMPERATURE UP TO 500°C AND HIGHLY REPRODUCTIBLE SYNTHESIS

机译:在比沸腾温度极限高且比分解温度低的温度下从温度高到沸腾温度且比分解温度低的温度下,通过热汽化成气相态,从高毒性和危险的液体前体合成纳米结构的高效激光安装。 500°C和高度可再生的合成

摘要

The invention relates to an installation for the synthesis of nanostructures to be employed in electronics and medicine. According to the invention, the installation comprises a high-power COlaser, a beam transport system (2), a tight reaction chamber (3), an internal combustion chamber (4), a system (13) for monitoring the beam power optically aligned with the beam axis (14), an injector (5) for injecting the gaseous precursor mixture from a system (7) of supply with technological gas, a mass control system (10), a stage evaporator (8) for heating the technological gas and converting liquid and gaseous precursors into a liquid phase, a system (9) for the supply and mass control of the liquid precursor, some thermostating systems (6) for monitoring the mixture temperature, a filter (11) for retaining the nanostructured powder formed upon interaction between the gas mixture and the laser beam, a flap (12) wherethrough waste gases are conveyed into a chamber (15).
机译:本发明涉及用于电子和医学中使用的纳米结构的合成的设备。根据本发明,该设备包括大功率COlaser,光束传输系统(2),紧密反应室(3),内燃室(4),用于监视光学对准的光束功率的系统(13)带有束轴(14),用于从技术气体供应系统(7)喷射气态前体混合物的喷射器(5),质量控制系统(10),用于加热技术气体的级蒸发器(8)并将液态和气态前体转化为液相,用于液体前体的供应和质量控制的系统(9),一些用于监控混合物温度的恒温系统(6),用于保留形成的纳米结构粉末的过滤器(11)在气体混合物和激光束之间相互作用时,挡板(12)通过该挡板被输送到腔室(15)中。

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