FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY WITH INCREASED EFFECTIVE CAPACITANCE
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机译:有效电容增加的柔性电容式微机超声传感器阵列
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摘要
A Capacitive Micromachined Ultrasonic Transducer (CMUT) (200) comprises a membrane (220) operatively connected to a top electrode (210) and a bottom electrode having a concave void (230). When a Direct Current (DC) bias voltage is applied, the membrane (220) is deflected towards the bottom electrode so that a peripheral edge region of the membrane (220) is closer to the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane (220) is increased.
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