PROCESS FOR PRODUCTION OF BACK-ELECTRODE-TYPE SOLAR CELL, BACK-ELECTRODE-TYPE SOLAR CELL, AND BACK-ELECTRODE-TYPE SOLAR CELL MODULE

摘要

A process for producing a back-electrode-type solar cell (1, 16), comprising a step of applying a solution (27) that comprises a compound containing an impurity of the same conductivity type as that of a silicon substrate (4), a titanium alkoxide and an alcohol onto the light-receiving surface of the silicon substrate (4) and heating the resulting product to form a light-receiving surface diffusion layer (6) and a anti-reflective film (7, 12), and a step of forming a light-receiving surface passivation film (8) on the light-receiving surface of the silicon substrate (4) by a heat treatment; a back-electrode-type solar cell (1, 16) provided with a light-receiving surface diffusion layer (6) and an anti-reflective film (7) that comprises titanium oxide containing an impurity of the same conductivity type as that of the silicon substrate (4) formed on the light-receiving surface diffusion layer (6); and a back-electrode-type solar cell module (35) equipped with the back-electrode-type solar cell (1, 16).