ELECTRODE ROD WHICH IS INCLUDED IN AN ELECTROSTATIC CHUCK IN ORDER TO FIX A SUBSTRATE BY USING ELECTROSTATIC FORCE, AN ELECTROSTATIC CHUCK, AND A SUBSTRATE PROCESSING DEVICE THEREOF

摘要

PURPOSE: An electrode rod, an electrostatic chuck, and a substrate processing device thereof are provided to prevent damage to an electrostatic chuck and a substrate by preventing an arching phenomenon.;CONSTITUTION: An electrode rod for an electrostatic chuck is made of a metal material and includes a metal electrode(221). A metal electrode has an upper side(2211) and a lateral side(2212). The upper side is contacted with a conductive layer in order to be electrically connected to the conductive layer included in the electrostatic chuck. The lateral side is formed in a closed curved shape which is connected to the upper side. The distance between the central axis and the lateral side of the metal electrode become thicker towards a lower side.;COPYRIGHT KIPO 2011