APPARATUS AND A METHOD FOR MANUFACTURING A CARBON NANO-TUBE USING CORONA DISCHARGE, CAPABLE OF SYNTHESIZING A VERTICALLY GROWING CARBON NANO-TUBE WITH LOW POWER AT LOW TEMPERATURE

摘要

PURPOSE: An apparatus and a method for manufacturing a carbon nano-tube using corona discharge are provided to efficiently synthesize the carbon nano-tube by mixing a thermal chemical vapor deposition method and a corona discharge method.;CONSTITUTION: An apparatus for manufacturing a carbon nano-tube includes an airtight body(10), a substrate, a gas supplying part(30), a temperature adjusting part(40), a cathode(50), and a power supplying part(60). The substrate is embedded in the airtight body. The gas supplying part and the temperature adjusting part are in connection with the airtight body. The cathode is adjacently arranged to the substrate. The power supplying part is in connection with the substrate and the cathode. In the substrate, an oxide film is formed on a silicon layer, and nickel is deposited on the oxide film.;COPYRIGHT KIPO 2011