首页>
外国专利>
MANUFACTURING PROCESS OF NANO-STRUCTURED COMPOUND THERMOELECTRIC MATERIALS USING METAL ORGANIC CHEMICAL VAPOR DEPOSITION
MANUFACTURING PROCESS OF NANO-STRUCTURED COMPOUND THERMOELECTRIC MATERIALS USING METAL ORGANIC CHEMICAL VAPOR DEPOSITION
展开▼
机译:金属有机化学气相沉积法制备纳米结构复合热电材料的工艺
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A method for manufacturing a nano-structured compound thermoelectric semiconductor by a metal organic chemical vapor deposition method is provided to economically increase a thermoelectric index of a thermoelectric element. CONSTITUTION: A metal organic compound precursor is transferred to a reaction tube(S01). The metal organic compound precursor is thermally decomposed(S02). The thermally decomposed precursor is crystallized by a nano size unit(S03). The crystallized precursor is applied on a substrate to form a thin film or a thick film(S04).
展开▼