Device for selecting particle of determined energy from particle beams, has magnets coupled with drive such that positions of magnets are changed, where particles of determined energy pass through opening of aperture stop

摘要

The device has an aperture stop (2), two magnets (3, 4) e.g. dipole magnets and quadrupole magnets, and another aperture stop (5) for a particle beam (1), which are successively arranged during particle beam motion. Particles of determined energy are diverted from passing through magnetic fields of the magnets. One of the magnets is coupled with a drive in such a manner that positions of the magnets are changed together. The particles strike on a body of the latter aperture stop as a particle trap. Particles of another determined energy pass through an opening (7) of the latter aperture stop.