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Brief description of embodiments of a component microelectronics not plane

机译:组件微电子学而非平面的实施例的简要说明

摘要

This process for the production of a microelectronic component is not plane, concave and in particular, comprises: (▪ to superimpose a layer incorporating an active circuit flexible in - the top of a cavity formed according to the desired profile of said component, said cavity being formed in a substrate; ▪ to apply a pressure differential on either side of said layer inducing the sagging of the flexible circuit in the cavity, and therefore its conformation with that - ci . The superposition of the flexible circuit and of the cavity is made: ▪ by filling the cavity by means of a material able to be selectively removed with respect to the substrate and the flexible circuit; ▪ then, by bonding or the formation of the flexible circuit in the cavity thus filled; ▪ then, by the formation of at least one passage for access to the cavity is filled; ▪ by selective etching of the material filling the cavity via at least one passage in order to remove said material.
机译:用于生产微电子部件的该过程不是平面的,凹的,并且特别地包括:(■叠加在其中包含有源电路的柔性层-根据所述部件的所需轮廓形成的腔的顶部,所述腔在衬底上形成挠性电路;▪在所述层的任一侧施加压力差,以引起柔性电路在空腔中的下垂,并因此使其与-ci一致。 :▪通过使用一种能够相对于基板和柔性电路选择性去除的材料填充空腔;▪然后,通过在这样填充的空腔中粘合或形成柔性电路;▪然后,通过形成填充至少一个用于通向腔的通道中的至少一个;▪通过经由至少一个通道选择性地蚀刻填充腔的材料以去除所述材料。

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