SEMICONDUCTOR CHIP FOR EVALUATION, EVALUATION SYSTEM, AND EVALUATION METHOD FOR HEAT RADIATING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor chip for evaluation by which heat resistance of a semiconductor device may be easily evaluated.;SOLUTION: A semiconductor chip for evaluation comprises a silicon substrate 100 working as a substrate of the semiconductor chip, on which a plurality of metal wiring films 101 for forming a resistance temperature sensing element consisting of a plurality of regions, one or a plurality of metal wiring films 102 for forming a heater consisting of one or a plurality of regions, an electrode 103 electrically connected to the metal wiring film 101, and another electrode 103 electrically connected to the metal wiring film 102 are formed.;COPYRIGHT: (C)2012,JPO&INPIT