Fe-Co BASED ALLOY SOFT MAGNETIC FILM FOR PERPENDICULAR MAGNETIC RECORDING MEDIUM, AND POWDER SINTERING SPATTERING TARGET MATERIAL FOR FORMING Fe-Co BASED ALLOY SOFT MAGNETIC FILM FOR PERPENDICULAR MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide an Fe-Co based alloy soft magnetic film used for a perpendicular magnetic recording medium or the like, capable of suppressing the formation of a crystal film even in a high temperature range, and a powder sintering sputtering target material for forming the Fe-Co based alloy soft magnetic film.;SOLUTION: There is provided an Fe-Co based alloy soft magnetic film for a perpendicular magnetic recording medium in which a film having a thickness of 20 to 300 nm is formed by sputtering a powder sintering target material whose compositional formula in an atomic ratio is expressed by ((Fe_X-Co_100-X)_100-Y-Ni_Y)_100-a-b-M_a-B_b, 10≤X≤70, 0≤Y≤25, 7≤a, 1≤b≤5, and 13≤a+b≤25 and in which the M element in the compositional formula is Nb and/or Ta.;COPYRIGHT: (C)2013,JPO&INPIT