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MAGNIFYING OBSERVATION DEVICE, MAGNIFYING OBSERVATION METHOD, PROGRAM FOR MAGNIFYING OBSERVATION, AND COMPUTER-READABLE RECORDING MEDIUM

机译:放大观测装置,放大观测方法,放大观测程序和计算机可读记录介质

摘要

PROBLEM TO BE SOLVED: To perform magnification change of an electron microscope seamlessly without changing modes and doing troublesome work in accordance with the mode change.;SOLUTION: A magnifying observation device comprises: parameter value set storing means 189 for storing a parameter value set specified in a first magnification control mode and a parameter value set specified in a second magnification control mode; electron microscope magnification adjusting means 68 for adjusting the electron microscope magnification of an electron microscope image taken by electron beam imaging means 11; and parameter value set specifying means 188 for changing and specifying the parameter value set which is stored by the parameter value set storing means 189 in accordance with the change of magnification control modes by magnification control mode changing means 187. When a display magnification adjusted by the electron microscope magnification adjusting means 68 reaches a predetermined magnification control mode changing magnification, the magnification control mode changing means 187 changes between the first magnification control mode and the second magnification control mode.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:在不改变模式的情况下无缝地进行电子显微镜的倍率改变并且不根据模式改变进行繁琐的工作。解决方案:放大观察装置包括:参数值集存储装置189,用于存储指定的参数值集在第一放大率控制模式下和在第二放大率控制模式下指定的参数值设置;电子显微镜倍率调节装置68,用于调节由电子束成像装置11拍摄的电子显微镜图像的电子显微镜倍率。参数值设定指定装置188,用于根据由倍率控制模式改变装置187进行的倍率控制模式的改变来改变和指定由参数值集合存储装置189存储的参数值集合。电子显微镜倍率调节装置68达到预定的倍率控制模式改变倍率,倍率控制模式改变装置187在第一倍率控制模式和第二倍率控制模式之间切换。版权所有:(C)2012,JPO&INPIT

著录项

  • 公开/公告号JP2012018812A

    专利类型

  • 公开/公告日2012-01-26

    原文格式PDF

  • 申请/专利权人 KEYENCE CORP;

    申请/专利号JP20100155412

  • 发明设计人 TAKAHASHI SHUSUKE;SATAKE KAZUMASA;

    申请日2010-07-08

  • 分类号H01J37/28;H01J37/21;H01J37/147;H01J37/22;

  • 国家 JP

  • 入库时间 2022-08-21 17:42:20

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