PROBLEM TO BE SOLVED: To perform magnification change of an electron microscope seamlessly without changing modes and doing troublesome work in accordance with the mode change.;SOLUTION: A magnifying observation device comprises: parameter value set storing means 189 for storing a parameter value set specified in a first magnification control mode and a parameter value set specified in a second magnification control mode; electron microscope magnification adjusting means 68 for adjusting the electron microscope magnification of an electron microscope image taken by electron beam imaging means 11; and parameter value set specifying means 188 for changing and specifying the parameter value set which is stored by the parameter value set storing means 189 in accordance with the change of magnification control modes by magnification control mode changing means 187. When a display magnification adjusted by the electron microscope magnification adjusting means 68 reaches a predetermined magnification control mode changing magnification, the magnification control mode changing means 187 changes between the first magnification control mode and the second magnification control mode.;COPYRIGHT: (C)2012,JPO&INPIT
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