Characterization using picosecond ultrasonic metal portion of the sample that can be exposed to erosion

摘要

Describes a method for evaluating the manufacturing process. The method includes generating an optical pump beam pulse, and be directed to the surface of the sample the optical pump beam pulse. To generate a probe pulse, turn on the surface of the sample and the probe pulse. I want to detect the probe pulse response signal. Change of the probe pulse, which changes according to the acoustic signal, to form a probe pulse response signal. Used to make the sample, evaluation of the manufacturing process steps of one or more may be made based on the probe response signal pulse. Furthermore, the method may be used for process control of the CMP process. In addition, devices are also described. [Selection Figure Figure 3