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A method for controlling the dynamic thermal load on a laser beam positioning system to achieve high throughput laser machining of workpieces
A method for controlling the dynamic thermal load on a laser beam positioning system to achieve high throughput laser machining of workpieces
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机译:一种控制激光束定位系统上的动态热负荷以实现工件的高通量激光加工的方法
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摘要
A method of accomplishing high-throughput laser processing of workpiece features arranged in a densely spaced pattern minimizes workpiece feature processing inaccuracy and quality degradation that result from dynamic and thermal loads on laser beam positioning and optical components directing the laser beam during workpiece feature processing. A preferred embodiment is implemented with a laser beam positioning system composed of a zero-inertia optical deflector of an acousto-optic beam deflector (AOD) or an electro-optical deflector (EOD) type, a galvanometer head, and a linear stage cooperating to position the laser beam among the workpiece features.
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