For hard disk substrate polishing liquid composition, as well as polishing method and method of manufacturing the hard disk substrate using the same

摘要

PROBLEM TO BE SOLVED: To provide a polishing liquid composition for a hard disk substrate, with which alumina abrasive grains can be prevented from piercing into a substrate without impairing productivity.;SOLUTION: In the polishing liquid composition for the hard disk substrate containing an α-alumina and water, the α-alumina has 20 to 70% α-crystallinity, ≥0.23° half width of a peak in 35.1 to 35.3° diffraction angle 2θ region derived from a surface 104 of the α-alumina in an X-ray diffraction spectrum of the α-alumina, 10 to 40 m²/g specific surface area of the α-alumina and 0.1 to 0.5 μm average particle diameter.;COPYRIGHT: (C)2009,JPO&INPIT