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Method for determining the optimal machining target in the manufacture of microelectronics
Method for determining the optimal machining target in the manufacture of microelectronics
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机译:确定微电子制造中最佳加工目标的方法
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摘要
A method is provided. for manufacturing, the method including processing a workpiece in a processing step, measuring a parameter characteristic of the processing performed on the workpiece in the processing step, and forming an output signal corresponding to the characteristic parameter measured. The method also includes setting a target value for the processing performed in the processing step based on the output signal.
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