Furnace to handle the high purity silicon and how pollution material to determine the amount of impurities contributing to high-purity silicon

摘要

How contaminating material to determine the amount of impurities contributes to high purity silicon, comprising the step of partially enclose a sample of high purity silicon in the contaminating material. Samples that are encapsulated in contaminated material is heated in a furnace. It is compared with the impurity content of the high purity silicon prior to the heating step, the change in the impurity content of the high purity silicon is determined after the heating step. Furnace for heat treating high purity silicon, includes a housing defining a heating chamber. During the heating at the annealing temperature for a period of time sufficient to Yakinamasu high purity silicon, is formed at least in part contributes to low contamination materials in high purity silicon impurities 400ppta below, the housing, the furnace, under the same heating conditions, and contributes to high purity silicon impurities 400ppta than average.