INTERPOLATION ERROR MEASUREMENT APPARATUS, INTERPOLATION ERROR MEASUREMENT METHOD, ENCODER, AND POSITION DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an interpolation error measurement apparatus having an improved detection accuracy of positional information.;SOLUTION: An interpolation error measurement apparatus is provided with an oscillator (40) that oscillates at a prescribed natural frequency; a code plate (10) that is disposed on the oscillator and to which a code indicating a position is given; a detection part (30) that detects the position indicated by the code as positional information and outputs a detection signal including the positional information; and a measurement part (60) that measures an interpolation error of the positional information based on the detection signal output from the detection part and a frequency component that corresponds to the natural frequency.;COPYRIGHT: (C)2012,JPO&INPIT