Disposing the hot component and that hot component canning the pyrocarbon on the surface of the carbon quality backing material, being production manner of the hot component canning the pyrocarbon

摘要

PROBLEM TO BE SOLVED: To provide: a method for producing a high-temperature member for a single crystal pulling apparatus, by which the life of the high-temperature member can be prolonged and the production efficiency of a high-quality single crystal can be improved; the high-temperature member for the single crystal pulling apparatus; and the single crystal pulling apparatus.;SOLUTION: In the production of the high-temperature member for the single crystal pulling apparatus, wherein the high-temperature member is obtained by covering a surface of a carbonaceous base material with a pyrolytic carbon, a cover layer formed of the pyrolytic carbon has an opening part where the carbonaceous base material being a lower layer is exposed, and the opening part is formed by using a flexible sheet which is previously processed into a desired shape of the opening part. It is especially preferable to obtain a high temperature member in which a dense cover layer having an opening part where the carbonaceous base material is exposed is formed on a surface of the carbonaceous base material by performing a chemical reaction operation after a flexible sheet is made to closely adhere to a portion of the surface of the carbonaceous base material. As the flexible sheet, a flexible carbonaceous sheet is preferably used.;COPYRIGHT: (C)2008,JPO&INPIT