MICROFABRICATION OF HIGH TEMPERATURE MICROREACTORS

摘要

Microreactors, methods of fabricating, and using such microreactors comprises a substrate having an outer periphery and composing two monolithic sections, each of said monolithic sections comprising two opposed main surfaces and one or more edges extending between the main opposed surfaces. One of the main surfaces from each of the monolithic sections are joined together at a substantially planar junction. The microreactor further comprises at least one microcapillary flow passage defined by surfaces within said substrate and having first and second ends. One or more inlets connect the outer periphery of said substrate with the first end of said microcapillary flow passage. One or more outlets connect the outer periphery of said substrate with the second end of said microcapillary flow passage, which may narrowingly taper. The substrate can be made from high purity fused silica. A metallic reagent and/or catalyst can be incorporated in the micro capillary passage.