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PHOTOLUMINESCENCE IMAGING SYSTEMS FOR SILICON PHOTOVOLTAIC CELL MANUFACTURING
PHOTOLUMINESCENCE IMAGING SYSTEMS FOR SILICON PHOTOVOLTAIC CELL MANUFACTURING
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机译:硅光伏电池制造的光致发光成像系统
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摘要
A method of photoluminence (PL) imaging of a series of silicon wafers, the method including the step of: utilizing incident illumination of a wavelength greater than 808 nm. The present invention further provides a method of analysing silicon semiconductor material utilising various illumination, camera and filter combinations. In some embodiments the PL response is captured by a MOSIR camera. In another embodiment a camera is used to capture the entire PL response and a long pass filter is applied to block a portion of the signal reaching the camera/detector.
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