A Fourier Transform Infrared (FTIR) Spectrometer integrated in a CMOStechnology on aSilicon-on-Insulator (SOI) wafer is disclosed. The present invention is fullyintegrated into acompact, miniaturized, low cost, CMOS fabrication compatible chip. The presentinventionmay be operated in various infrared regions ranging from 1.1 µm to 15 µmor it can cover thefull spectrum from 1.1 µm to 15 µm all at once.The CMOS-FTIR spectrometer disclosed herein has high spectral resolution, nomovableparts, no lenses, is compact, not prone to damage in harsh external conditionsand can befabricated with a standard CMOS technology, allowing the mass production ofFTIRspectrometers. The fully integrated CMOS-FTIR spectrometer is suitable forbatteryoperation; any and all functionality can be integrated on a chip with standardCMOStechnology. The disclosed invention for the FTIR spectrometer may also beadapted for aCMOS-Raman spectrometer.
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