SPR GAS SENSING DEVICE MANUFACTURING METHOD USING MOLECULARLY IMPRINTED POLYMER

摘要

Disclosed is a surface plasmon resonance (SPR) gas sensor chip manufacturing method of depositing a metal layer on a substrate and depositing a thin film sensing layer on the metal layer. The method includes depositing self-assembled monolayers (SAMs) on the metal layer, depositing a radical initiator for depositing a molecularly imprinted polymer (MIP) on the SAMs, and mixing a template monomer, a functional monomer and a cross linker and optically reacting and removing the template monomer through the irradiation of ultraviolet (UV) light based on an absorption wavelength of the radical initiator, thereby forming an imprinted space in the thin film sensing layer.