首页> 外国专利> DEVICE FOR PRODUCING ALUMINUM NITRIDE CRYSTAL GRAINS, METHOD FOR PRODUCING ALUMINUM NITRIDE CRYSTAL GRAINS, AND ALUMINUM NITRIDE CRYSTAL GRAINS

DEVICE FOR PRODUCING ALUMINUM NITRIDE CRYSTAL GRAINS, METHOD FOR PRODUCING ALUMINUM NITRIDE CRYSTAL GRAINS, AND ALUMINUM NITRIDE CRYSTAL GRAINS

机译:氮化铝晶体颗粒的生产设备,氮化铝晶体颗粒的生产方法和氮化铝晶体颗粒

摘要

Provided are aluminum nitride crystal grains in which each individual grain has a grain size of 0.05 µm to 1 µm and a shape selected from any of a hexagonal prism, a hexagonal drum shape, a hexagonal pyramid, or two hexagonal pyramids where the base surfaces thereof are joined together. A production device (1A) comprises: a first reaction chamber (7a) for generating aluminum chloride gas by reacting hydrogen chloride gas and aluminum heated to a temperature that is the melting point of the aluminum or lower; a second reaction chamber (2a) for growing aluminum nitride crystal grains by reacting ammonia gas and the aluminum chloride gas; a heater (3) for heating the first reaction chamber (7a) and the second reaction chamber (2a); and a shroud (9) for separating the ammonia gas and the aluminum chloride gas up to the second reaction chamber (2a). As a result, a device for producing aluminum nitride crystal grains can be provided with which aluminum nitride crystal grains that are single crystals can be efficiently produced.
机译:提供氮化铝晶粒,其中各个晶粒的粒径为0.05μm至1μm,并且其底面选自六棱柱,六方鼓形,六棱锥或两个六棱锥中的任意一种形状连接在一起。生产装置(1A)包括:第一反应室(7a),用于通过使氯化氢气体和加热到铝的熔点以下的温度的铝反应来生成氯化铝气体;和第二反应室(2a),其通过使氨气与氯化铝气体反应来生长氮化铝晶粒。加热器(3),其用于加热第一反应室(7a)和第二反应室(2a)。罩(9)用于将氨气和氯化铝气体分离到第二反应室(2a)。结果,可以提供用于生产氮化铝晶粒的装置,利用该装置可以有效地生产作为单晶的氮化铝晶粒。

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