MULTI-CANTILEVER BEAM STRUCTURE OF PROBE CARD AND MANUFACTURING METHOD THEREFOR

摘要

The present invention relates a multi-cantilever beam structure and a manufacturing method therefor, the multi-cantilever beam structure comprising: a stereobate part which is formed on a substrate member of a probe card;a lower beam which has one end fixed on the upper surface of the stereobate part and is extended in the lateral direction; support parts formed on both ends of the lower beam; support parts formed on both ends of the lower beam;an upper beam which has both ends fixed on the support parts, respectively, and is configured to have a structure parallel to the lower beam at regular intervals in the upward and downward direction; and a probe tip which is formed to vertically protrude from another end of the upper beam to be electrically connected to a semiconductor wafer, wherein the stereobate part, lower beam, support parts, upper beam, and probe tip are formed on a space transformer in an MEMS scheme. According to this manufacturing method, the multi-cantilever beam is three-dimensionally formed on the space transformer through the MEMS scheme, which makes it possible to control the angle of a two-step beam such that the distance between beams becomes wider while the gap between probe tips becomes narrower.