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Integrated optical waveguide evanescent field sensor and longitudinal section of a substrate for use in such a sensor

机译:集成的光波导瞬逝场传感器和用于这种传感器的基板的纵向截面

摘要

The invention relates to an integrated optical waveguide evanescent field sensor (1) for sensing of chemical and/or physical quantities, comprising a substrate (2) carrying a waveguide layer structure provided with- a waveguide core layer (10) sandwiched between two cladding layers (11,12) formed by a lower (11) and a upper (12) cladding layer, of a lower refractive index than the waveguide core layer (10),- a sensing section (14A,14B) comprising a sensing layer (13) included in the upper cladding layer (12), wherein a longitudinal section of said substrate including said waveguide layer structure and said sensing section (14A,14B) is exchangeable as a separate element (20).
机译:本发明涉及一种用于感测化学和/或物理量的集成的光波导渐逝场传感器(1),其包括承载有波导层结构的衬底(2),该波导层结构具有-夹在由下(11)和上(12)包层形成的两个包层(11,12)之间的波导芯层(10),其折射率低于波导芯层(10),-包括包括在上包层(12)中的感测层(13)的感测部分(14A,14B),其中包括所述波导层结构的所述基板的纵向部分和所述感测部分(14A,14B)可以互换。一个单独的元素(20)。

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