VACUUM-ARC EVAPORATOR FOR GENERATING A CATHODE PLASMA

摘要

A vacuum-arc evaporator for generating a cathode plasma is proposed. The invention relates to the technology for obtaining high-velocity plasma streams with electric-arc evaporation of a solid-state cathode in a vacuum. The evaporator can be used to obtain various types of coatings or films for various purposes by deposition of ions of a plasma stream on the surface of articles to be treated. The vacuum-arc evaporator comprises an anode, an electromagnetic coil enveloping the body in the form of a tube section, a cylindrical cathode, a ferromagnetic ring encircling the cathode in the vicinity of its front end surface to be evaporated and a ferromagnetic sleeve that surrounds the cathode holder. In order to improve the operating efficiency of the evaporator the latter is provided with additional annular ferromagnetic elements. These elements together with the ferromagnetic shield reduce the scattered magnetic fields of the electromagnetic coil and produce a significant increase in the magnetic field intensity on the cathode surface to be evaporated without an increase of the number of ampere turns in the electromagnetic coil. The increase in the magnetic field intensity at the operating face of the cathode ensures a high stability of the arc discharge, an increase in the output ion current, and also a reduction in the droplet phase in the cathode erosion products due to an increase in the rate of movement of the cathode arc spots.