Suitability determination method for determination standard value and method for specifying optimum value thereof, inspection system for substrate on which components are mounted, simulation method at production site, and simulation system

摘要

The determination of the suitability of the determination standard value for an intermediate inspection and a process for specifying the optimum value of the determination standard value are accurately performed even if the number of actual measured values indicating a defect is small. A correlation between the measured values X for which the intermediate inspection is to be performed and the measured values Y for which the final inspection is to be performed is derived. Thereafter, for each of a plurality of calculation target points set on the X-axis, the distribution pattern of the measured values Y for the measured value Xn indicated by that point is specified based on the correlation, and the probabilities of the range WOK that is determined to be non-defective with the determination standard value Ys of the final inspection and the range WNG that is determined to be defective that are included in the distribution are calculated. Further, for each of the ranges of the measured values X that are respectively determined to be defective and non-defective with the determination standard value Xs of the intermediate inspection, the degree of consistency and the degree of inconsistency between the results of the inspections are determined using the probabilities determined for the calculation target points included in that range, and the suitability of the determination standard value Xs is determined based on the two degrees.