METHODS FOR ANALYZING AND REGENERATING A METALLIC FILM ETCHING SOLUTION CONTAINING MOLYBDENUM USING AN ION-CHROMATOGRAPHIC METHOD CAPABLE OF IMPROVING THE ETCHING CAPABILITY OF THE ETCHING SOLUTION

摘要

PURPOSE: Methods for analyzing and regenerating a metallic film etching solution containing molybdenum using an ion-chromatographic method are provided to minimize the failure of an etching process by controlling the concentration of the etching solution.;CONSTITUTION: An etching solution containing phosphoric acid, nitric acid, and acetic acid is analyzed using an ion-chromatographic method. A method for regenerating the etching solution includes the following: The etching solution is analyzed. Nitric acid or acetic acid is added to 1-10 wt%. A method for etching a film containing molybdenum includes the following: The film containing molybdenum is wet-etched using the etching solution. The contents of the phosphoric acid, nitric acid, or acetic acid in the etching solution are quantitative-analyzed. The lost content of nitric acid or acetic acid is added to regenerate the etching solution.;COPYRIGHT KIPO 2012